Welcome to the South Australian Node of the Australian National Fabrication Facility
Vacuum furnace
Red Devil -RD Webb
Furnace
Micro and nano fabrication
Any
6 inch diameter wafers
Scale:
Function:
Fabrication step:
Material:
Use:
Allow bonding of microfluidic devices and heat treatment of devices
The Red Devil is a high temperature vacuum/inert gas furnace designed specifically for university, industrial, and government research laboratories. Because of it's unique and patented features, it is often used for manufacturing and production of small high value components as well.
No cooling water or drain is required and a standard wall outlet provides sufficient electrical power to operate the furnace at full temperature. There are no water cooling channels to clog, no chamber corrosion from galvanic action, and no water cooling leaks degrading vacuum quality.
1200°C and 10 E-5 mbar
The table top furnace comes complete with all components required for operation.